KLA-Tencor HRP 100, HRP 200, & HRP 340 High Resolution Profilometers: The KLA-Tencor High Resolution Profiler (HRP) is a highly sensitive surface profiler capable of obtaining images as small as 0.5 µm X 0.5 µm to as large as 150 mm X 150 mm. The HRP uses dual-stage, stylus-based scanning to achieve AFM-scale resolution in a production environment, yet it can correlate local submicron features with global surface measurements. The HRP features the ability to measure even submicron features with a vertical resolution of 0.1 Å and a lateral resolution of 1 nm, which makes it particularly useful for surfaces treated with the new submicron processes such as Chemical-Mechanical Planarization. The HRP-100 and HRP-200 models are automated surface scanners that can profile a variety of samples, including:
The HRP-100 can scan a variety of surfaces, but it is specifically designed for the disk drive industry. Featuring advanced, nanometer-level analysis of laser texture bumps and poletip recession, theHRP-100 is ideal for characterization of disk, head and water surfaces. HRP-200 is designed for characterization of advanced semiconductor processes such as CMP and Hemispherically Grand Polysilicon. The HRP-200 includes a handler that can be automated and used as production tool.
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Photo of the KLA-Tencor HRP 100:
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