KLA Tencor Alpha-Step 300 Step-Height Profiler

The Alpha-Step 300 Step-Height Profiler is computerized, high-sensitivity surface profiler that measures roughness, waviness, and step height in a variety of applications.  It features the ability to measure micro-roughness with 1Å resolution over short distances as well as waviness over a full, 10-mm (400-mil) scan.  The built-in PC/AT computing power offers precise, automatic measurement capability, data storage and data analysis. 

The Alpha-Step 300 can profile a variety of materials including magnetic disks, semiconductor wafers, precision-machines and polished surfaces, ceramics for micro-electronics, glass for flat panel displays, and optical surfaces.

The instrument is available in two basic hardware configurations (normal and Open Frame, which accommodates large samples) and two basic software configurations (normal and automatic).  Additional hardware and software options such as the Motorized Level/Rotation Option, Sequence/Database Manager Option, Interactive 3-D Option, SECS Interface Option, etc., can be added.

Features Include:

• Measurement of vertical features ranging from under 100Å(0.4 µin.) to approximately 0.3 mm (11 mils), with a vertical resolution of 1 or 25Å(0.004 or 0/1 µin.).  Measurements can be taken in either metric or English units, which are selectable independently for horizontal and vertical parameters.
• Measurement of many roughness and waviness parameters with roughness and waviness separated by user-selectable cutoff filters.  The Band Pass Filter Option allows the separation of intermediate wavelengths.
• Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.
• Built-in, 80386-based PC/AT controller with 40 Mbytes of disk storage.