PRI Automation: PRI-2000, PRI-3000, & PRI-4000 Series Robots
PRI Automation robotic systems completely automate wafer transfer and cassette load/unload operations for FSI and SemiTool semiconductor spray processing equipment and wet bench cleaning tools.
Designed for Class 10 clean room environments, the PRI-2000, PRI-3000, and PRI-4000 series robots can substantially improve production yield by greatly reducing particulate contamination during all cassette/ wafer handling operations associated with spray processing operations.
Highlights:
Automates all wafer and cassette handling during spray processing operations
High throughput: allows two spray processors to be serviced by a single by a single system
Class 10 design reduces product contamination; improves product yield
Input/output queues all continuous , unattended operation
Compact design; small footprint saves clean room floor space
Built-in supervisory computer provide cassette tracking, ease-of-use, and recipe management-with or without connection to host
Individual wafer handling option allows cassettes to be automatically filled and balanced prior to processing
Integrated, pre-programmed configuration permits immediate installation and operation |
