PRI Automation: PRI-1000, PRI-5000 & PRI-6000 Series Robots:
PRI Automation clean room robotic systems completely automate wafer transfer, graphite boat and cassette load/unload operations for PECVD furnaces.
Designed for Class 10 clean room environments, the PRI-1000 and PRI-1100 series robot arms and the PRI-5000 / PRI-5100 and PRI-6000 / PRI-6100 systems can substantially improve production yield by greatly reducing particulate contamination during all cassette/ wafer handling operations associated with spray processing operations.
Highlights:
Automates all wafer and cassette handling during PECVD furnace loading operations
High throughput: the PRI 1100 robot arm loads wafers to graphite boats. The PRI 5000 Boat Loader then transfers the boats to the PECVD furnace.
Class 10 design reduces product contamination; improves product yield
Input/output queues all continuous , unattended operation
Compact design; small footprint saves clean room floor space
Built-in supervisory computer provide cassette tracking, ease-of-use, and recipe management-with or without connection to host
Individual wafer handling option allows cassettes to be automatically filled and balanced prior to processing
Integrated, pre-programmed configuration permits immediate installation and operation |
