Spare Parts
Entrepix offers quality parts for a variety of legacy equipment within the CMP module. Entrepix supports platforms from Novellus (IPEC, SpeedFam), Lam Research (OnTrak) and Rudolph Technologies. Entrepix provides the highest quality components selected or designed to meet OEM standards. Professional support and consulting are available through our inside sales group and product managers. Order accuracy is essential for our customers, therefore outgoing inspections are provided.
Entrepix has assigned product managers and engineering team to find engineering solutions to address obsolete parts or components.
| IPEC | 372M, 472, 676, 776 |
| SPEEDFAM | CMP-V, AURIGA, AURIGA-C, AURIGA EC |
| ONTRAK | DSS-Series 0, 1, 2 (Classic/CE), Synergy, Integra |
| RUDOLPH | AutoEL III, IV |
OnTrak Cleaner Key Spare Parts
Speedfam / IPEC Polisher Key Spare Parts
Applied Materials / AMAT Original Surplus Spare Parts (in inventory)
For a quote: parts@entrepix.com
Aaron Contreras: (602) 426-0720