Dektak 8 Surface Profiler:
 
The Dektak 8 accurately characterizes film thickness, roughness, stress and defects on samples up to 200mm. Featuring low-force tip technology, long-scanning capability, and industry-leading data analysis software, the Dektak 8 offers superior performance in a bench top configuration.

Precision:

• 7.5 Angstrom/ 1 sigma repeatability

• 1 Angstrom resolution

• 3D surface profiling with Vision 32 analysis package: Characterize film roughness, shape and stress in true 3D

• Low force sensor technology: Scan soft materials accurately without damage
  • Super-sharp and high aspect ratio tips: Advanced tip geometries for deep trenches and soft materials

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Flexibility for a Wide Range of Applications:

• Metal etch uniformity on wafers up to 150 mm/ 6 inches
• Thin-film stress calculation on small wafers
• Transparent films and photoresist thickness
• Characterization of MEMS development
• Compound semiconductor devices on GaAs wafers
• Microlens height/ curvature and V groove depth
• Roughness on machined parts
• Thin-film and thick—film coatings
• Surface quality and defect review

Dektak 6M Surface Profiler:
 
The Veeco Dektak 6M Surface Profiler delivers a unique combination of ease of use, precision measurements, and simplicity of design in a economical, compact design. In addition, the 6M offers proven performance and reliability from years of field experience.

Features include:

• Low-inertia sensor technology for improved measurement repeatability

• Programmable stylus force down to 1 milligram. This enables scanning of soft surfaces

• Vertical ranges up to 262 microns with 1 mm as an option. This feature allows for large step-height measurements for MEMS applications

• High aspect ratio tips allow deep trench measurements
• Step Height Repeatablility: 7.5 A, 1 Sigma guaranteed.
•  Baseline Stability for Long Scans:
• Long-scans up to 30mm
• Extremely stable baseline
• Up to 30,000 data points per scan
• Extended vertical range up to 1mm
• High –Resolution Roughness Measurements: Ra less than 10 angstroms)

Photo of  Dektak 6M Surface Profiler

Flexibility for a Wide Range of Applications:

• Metal etch uniformity on wafers up to 150 mm/ 6 inches
• Thin-film stress calculation on small wafers
• Transparent films and photoresist thickness
• Characterization of MEMS development
• Compound semiconductor devices on GaAs wafers
• Microlens height/ curvature and V groove depth
• Roughness on machined parts
• Thin-film and thick—film coatings
• Surface quality and defect review