AMAT Refurbished CMP Equipment
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For AMAT refurbished equipment: For AMAT spare parts and upgrades: For AMAT equipment service / maintenance:  |
AMAT Mirra Trak - CMP Wafer PolisherThe Applied Mirra CMP system is an automated system that uses a combination of chemistry and abrasion under controlled conditions to remove specific amounts of material from wafer surfaces. The Mirra Trak delivers industry-leading 200 mm CMP on all polishing applications. Wafers are processed dry-in and dry-out with an integrated OnTrak DSS Integra scrubber. It includes a FABS unit that can accommodate up to four 25-wafer cassettes, attaching a recipe and automatically performing a sequence to each wafer. The system's polishing head optimizes uniformity across the wafer by tuning film removal rate to match specific slurry chemistries to control dishing and erosion in high performance polishing applications. |
Preventative Maintenance ProgramOverview of Service
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