Strasbaugh Refurbished CMP Equipment

Strasbaugh 6EC nSpire CMP Wafer Polisher

For Strasbaugh refurbished CMP equipment:
info@entrepix.com

For Strasbaugh CMP spare parts:
parts@entrepix.com

For Strasbaugh service or maintenance:
service@entrepix.com

Or Call:
602-426-8677

Strasbaugh 6EC nSpire - CMP Wafer Polisher

The Strasbaugh 6-EC model is an economical tool for chemical mechanical planarization (CMP) research, failure analysis and low volume production. Its semi-automatic operations are programmable through a color touch screen graphical user interface (GUI) for repeatable and accurate process control.

The 6-EC comes standard with one slurry pump and the option for a second. The small dimensions (48-inch x 37-inch x 72-inch) offers one of the smallest stand-alone systems with pad conditioning. The system is available for 4-inch, 6-inch or 8-inch wafers.

Preventative Maintenance Program

Overview

General Clean and Inspections
Clean and Lubricate All Rails and Drives
Baseline Equipment
Load Calibrations
Platen Run Out
Arm Sweet Calibrations
Carrier Run Out
Down Force Calibration
Back Pressure Calibrations
Pad Conditioner Operations Check
Unload Calibrations
Tool-Specific Issues Addressed