AMAT Mirra

Entrepix provides upgrades, refurbishments, and parts for AMAT Mirra and Mirra Mesa CMP polishers.

Entrepix offers numerous Applied Materials Mirra platform upgrades, including new and improved head rotation motors with drivers, our polish head tester, and a full range of Teflon coating services.

AMAT Mirra Upgrades

Entrepix offers numerous Applied Materials Mirra platform upgrades, including new and improved head rotation motors with drivers, our polish head tester, and a full range of Teflon coating services.

Click below to see our full list of AMAT Mirra upgrades.

Entrepix sells AMAT Mirra CMP replacement parts, even if they are obsolete.

Your Source for Mirra Polisher Replacement Parts

Entrepix is your go-to source for AMAT Mirra CMP replacement parts — even if those parts are obsolete. We have you covered whether you’re looking for a simple pressure transducer for your UPA system or need a fully assembled and tested polish head, HCLU, or pad conditioner.

Entrepix equipment engineers are experts in rebuilding all types, sizes, and configurations of CMP heads.

Polish Head Rebuilds

Our experienced equipment engineers are experts in rebuilding all types, sizes, and configurations of CMP heads. We have the tools and knowledge to get you an optimally functioning head the first time, every time.

Refurbished Mirras, at Your Service

Need to expand your Mirra functionality without sourcing an entirely new platform? Entrepix refurbishes your existing Mirra tools including:

  • Mirra 3400 Standalone

  • Mirra Trak

  • Mirra Mesa

We also specialize in refurbishment of 300mm Reflexion tools, including standard and Reflexion LK models.

Concierge design and manufacturing services improve system performance

 

The Entrepix engineering team will make it for you. We have developed a number of upgrades and custom engineering solutions for CMP equipment, including AMAT Mirra platforms.

You might think it’s magic, but really it’s our experienced, creative team of engineers who know and love CMP.