Entrepix is a recognized leader in refurbished CMP and thin-film metrology equipment as well as the only OEM authorized refurbisher of Lam/Ontrak Post CMP Scrubbers. Entrepix also holds the exclusive license from Rudolph Technologies for the AutoEL series of ellipsometers.


Entrepix' extensive CMP and related metrology experience coupled with our CMP Foundry division provides a unique understanding of both the hardware and process issues our customers face.


As an end user within our own CMP foundry division, we recognize the importance of having equipment that meets OEM specifications and is supported by a company you can rely on day in and day out. Entrepix guarantees this level of quality and after-sale support with every piece of equipment we sell.


Entrepix offers a variety of field service programs to accommodate all customer service requirements while enabling cost-savings by tailoring our offerings to meet your facility's needs.


Field service offerings include: