Foundry Equipment Sets

Entrepix (Tempe): Die Size up to 200 mm / 300 mm

Process	Make & Model
Polishers	IPEC 472
	IPEC 372M (with SteadySweep)
	AMAT Mirra Mesa (integrated)
	AMAT Mirra 3400 (stand-alone)
	Beuhler Minimet

Cleaners	OnTrak DSS-200 Synergy
	OnTrak DSS-200 Series II
	PolyPros megasonic immersion tank
	Semitool SRD (various wafer sizes)

Spin Processors	SEZ SP 101 (75 mm - 150 mm)
	SEZ SP 303 (200/300 mm)

Lapping	Lapmaster 24
	Speedfam Spitfire 24

Metrology	Make & Model
Dielectric Film Thickness	Thermawave Optiprobe 2600DUV
	Thermawave Optiprobe 2600B
	Mikropack UV/Vis/NIR Reflectometer

Conductive Film Thickness	CDE ResMap 168 4-point probe

Substrate Thickness	FSM 413-300

Surface Profilometer	Dektak D8 (ultralow force & 3D mapping)
	Veeco Vx300 Atomic Force Profiler
	Tencor P2

Defect Inspection	Tencor 5500 (75 mm - 200 mm)
	KLA-Tencor SP1 TBI

Defect Review	Leica MIS-200 optical review

Optical Microscopes	Zeiss Ergoplan (Nomarski DIC)
	Leica stereozoom

Precision Balance	A and D, Sartorius

Miscellaneous	Agilent 4073 (E-15 log amps - parametric)
	Analytical and Characterization Equipment

3rd Party Available	SEM, TXRF & Others (additional fee)