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1995 - Qty ≤ 2

CMOS

OXIDE

TUNGSTEN

2001 - Qty ≤ 5

CMOS

OXIDE

TUNGSTEN

Cu (Ta BARRIER)

SHALLOW TRENCH

POLYSILICON

2011 - Qty ≥ 40

CMOS

NEW APPS

SUBSTRATE/EPI

OXIDE

MEMS

GaAs & AIGaAs

TUNGSTEN

NANODEVICES

POLY-AIN & GaN

Cu (Ta BARRIER)

DIRECT WAFER BOND

InP & InGaP

SHALLOW TRENCH

NOBLE METALS

CdTe & HgCdTe

POLYSILICON

THROUGH Si VIAS

Ge & SiGe

LOW k

3D PACKAGING

SIC

CAPPED ULTRA LOW k

ULTRA THIN WAFERS

DIAMOND & DLC

METAL GATES

NiFe & NiFeCo

Si & SOI

GATE INSULATORS

AI & STAINLESS

LITHIUM NIOBATE

HIGH k DIELECTRICS

DETECTOR ARRAYS

QUARTZ & GLASS

Ir & Pt ELECTRODES

POLYMERS

TITANIUM

NOVEL BARRIER METALS

MAGNETICS

SAPPHIRE

INTEGRATED OPTICS