Therma-Wave Opti-Probe and Therma-Probe spare parts

Spare Parts

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Therma-Wave Opti-Probe Platforms

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Material #	Description
18-018064	Autofocus MKIIIA, HC (New lateral cell, works with 14-017976) Auto-Focusing Interconnect PCB
11-007849	Cable Assy, AF (AF to optics plate connector)
11-007850	Cable Assy, AF Detector (Bi-cell detector to AF)
11-008303	Cable Assy, AF LED
11-008305	Cable Assy, AF Limit Sense
11-008306	Cable Assy, AF Limit Switch (Switch does not come with actuator arm)
79-003093	Fluid, Damper
09-002363	Switch Actuator, and Insulator Pad (Part of the AF limit switch)
18-008100	Motor Assy, Linear, Large (Lens Exchange Motor)
66-006790	motor, 60.5:1, W/05/32shift, G/box (Coarse Z Motor)
18-009479	Block Assy, Beam, Solenoid Actuated (Shutter in front of the laser diode)
97-021020	Camera, CCD Pulnix, Color+BW DC Sync
11-007848	Cable Assy, Camera
18-007478	Detector Assy, I laser
18-007482	Detector Assy, Autofocus (Bi-cell detector)
18-009252	Detector Assy, Quad Cell
11-007478	Cable Assy, Optics Plate, Detector (also connects to A & B arrays)
18-012799	Detector Array, OP2600 (A and B array detector assy)
11-010258	Cable Assy, Array Detector/Bracket
18-010547	Detector Assy, A-Spectro (C-Array detector)
29-020700	Fiber, Optic Bundle, 48 in, custom (For standard 3260 & 3260I tools)
18-020298	Filter Assy, Hot, IR, OR (IR filter)
66-008099	Solenoid, Rotary 45 Rt, 11V, Cont. (Motor for yellow filter)
18-010545	Grating Assy, A-Spectro
25-008879	Head, Laser Diode
11-008255	Cable Assy, Laser Driver
65-002725	Lens, Objective, 5X
18-010242	Lens Assy, Tested, Objective (100X lens with heater)
65-007372	Pinhole, 400 Micron
14-017976	PCB Assy, AF Interconnect (Works with MKIIIA autofocus and not with MKIII autofocus)
14-007135	PCB Assy, AF Interconnect (Works with MKIII autofocus and not with MKIIIA
18-008218	Sensor Assy, Humidity
65-006218	Shutter, White Light, 6mm Diameter (Used in front of the fiber bundle and Aperture)
11-010257	Cable Assy, Adpt, Shutter (Cable White Light Shutters and the Laser Shutter)
11-010306	Cable Assy, Bracket/Shutter
18-010747	Wheel Assy, Chopper, DC, OP2600
11-010402	Sensor Assy, Chopper (The optical sensor at the side of the Chopper Wheel assy)
11-008265	Cable Assy, Adapter, Chopper Wheel
14-012422	PCB Assy, AF, I/C, DUV
14-013953	PCB Assy, AF, I/C, Tested, DUV (Part of the Autofocus Interconnect Assy, obsolete on 5/15, replaced by 14-012422)
10-013126	Relay, 24VDC, 3PDT (within the Box Assy, Interlock, UV)
11-012908	Harness Assy, Interlock Box, UV
29-003329	Lamp, Neon, Green, 105-125V
29-013124	Lamp, Incandescent, 28VDC, Red Cardcage/Power Supply/Drivers
28-007863	Blower, Electric Box
32-007929	Cap, UF0010.000, Blower
60-002590	Guard, Finger, Blower
60-007095	Fan Transition Assy (Outer plastic cover for the exhaust hose)
11-009226	Cable Assy, Air Flow Switch (Cable comes with switch)
14-006060	PCB, AT A/D
14-008526	Controller, Stepper Motor, P23
11-012742	Cable Assy, Limit Switch/Motor Drive, UV (Cable connecting the stage to P23 Controller at the stage chamber)
14-010064	PCB Assy, Analog Processor
11-007836	Cable Assy, Flat, 50 Cond., A/D (Interfaces Analog PCB and the A/D PCB
14-009631	PCB Assy, Digital Controller Interface
14-012176	PCB Assy, Light Pen, DT360, P26, Configured
11-012177	Cable Assy, Light Pen, Extension
11-014147	Cable Assy, Cognex Video In
11-014148	Cable Assy, Cognex Video Out
11-014152	Cable Assy, Cognex, Interface Power
11-014146	Cable Assy, Cognex to Optics Plate
11-014151	Cable Assy, Cognex Monitor
11-014150	Cable Assy, Trackball Signal
14-018690	PCB, Tested, 133MHz, 16Mb, S, V, L2
11-008081	Cable Assy, Int VGA Monitor
11-014616	Cable Assy, Floppy Controller
11-014255	Cable Assy, SCSI, HD/Backu only)
06-020931	Connector, Adapter, SCSI, HD B68P-IDC50P (May be mounted on the CPU board)
14-007190	PCB, Backplane, 14 Slot, AT
14-020924	PCB, Backplane, ISA/PCI, 10+1+3 (For NT systems only)
11-021116	Harness Assy, DC Power, Backplane, NT
11-021068	Cable Assy, Sense, +5V, NT
14-010502	PCB Assy, SECS, Configured, OP (For host computer communication only)
24-002800	Fuse, MDA, 4 Amp, 250 VAC
24-006673	Fuse, MDA, 20 Amp, 250 VAC
24-007082	Fuse, MDA, 1 ½ Amp, 250 VAC
24-014624	Fuse, MDQ, 9 Amp, 32 VAC
24-014625	Fuse, MDQ, 12 Amp, 250 VAC
24-020912	Fuse, 3AB SB, 3 Amp, 250 VAC
24-013287	Fuseholder, PNL MT, HTB, RT Ang
18-007284	Power Supply Assy, Analog, +/-15V, 3A
18-014554	Power Drawer Assy, Electric Box, CE
18-014555	Circuit Breaker Assy, OP2600, CE
24-015284	Contactor, 4 Pole, 35A, 24V
20-006099	Filter, RFI, 10A
24-001842	Fuse, MDL, 1 Amp, 250 VAC
24-002800	Fuse, MDA, 4 Amp, 250 VAC
24-003607	Fuse, MDA, 10 Amp
24-007082	Fuse, MDA, 1 ½ Amp, 250 VAC
24-007083	Fuse, MDA, 8 Amp, 250 VAC
29-003329	Lamp, Neon, Green, 105-125V
10-008537	Relay, Time Delay, 10 Sec, 24 VAC
33-014306	Res, Movistor, 250 V, 130 Joule
18-009941	Power Supply Assy, Laser Diode (Gold box above the Vexta drivers)
11-010471	Cable Assy, Laser Driver Monitor
30-009302	Printer, Buffer, HWP-4000
11-015396	Cable Assy, On/Off Power Switch (Cable and Switch comes together)
11-021070	Cable Assy, Power, User Interface, NT (For NT systems only, feeds
18-009376	Center/Flat Finder Assy, 5”
21-008878	Driver, Laser Diode, 670nm
30-007271	Drive, Flexible, 3 ½” (Floppy drive)
30-015939	Drive, Tape Backup, SCSI 2.3 GB
30-016561	Tape, Data, 3210XL, QIC-3210, 128M
11-021069	Cable Assy, Power, HDDR, NT
18-017323	Drive, Formatted, 2GB (hard disk)
56-009155	Isolator, Precision Vibration
30-015486	Keyboard, PC-AT, OP2600
30-018069	Keyboard, PC/AT&PS2, Mini (Short keyboard for NT systems
30-019051	Monitor, VGA, 15", CE Marking (For both VGA and Video after 3/98)
30-006182	Monitor, Color, NTSC (Obsolete in 3/98. Upgrade kit PN:
61-021076	Video to VGA, to use VGA monitor for Video using a

Therma-Wave Opti-Probe and Therma-Probe spare parts

Spare Parts

Order Spare Parts/Place System Quote

Equipment Services

Therma-Wave Opti-Probe Platforms

Material #

Description