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Refurbished CMP and Thin-Film Metrology Equipment

CMP-Polisher

IPEC

SpeedFam - IPEC 372M

SpeedFam - IPEC 472

SpeedFam - IPEC 676

Speedfam - IPEC 776


Speedfam

Speedfam - Auriga

Speedfam - Auriga C

Speedfam - Auriga EC


AMAT

AMAT - Mirra

AMAT - Mirra Trak

AMAT - Mirra Mesa

AMAT - Reflexion

AMAT - Reflexion LK


Strasbaugh

Strasbaugh - 6DSSP - nTegrity

Strasbaugh - 6EC - nSpire 6EC

Strasbaugh - 6EC - nHance 6EG


Tabletop-CMP-Polisher

Buehler Ecomet 4 Table top and lapping

Logitech LP-50 Table top and lapping


Post CMP

OnTrak DSS-200

OnTrak Series 2 - DSS200

OnTrak Series 1 - DSS200

OnTrak Synergy - DSS200

OnTrak Integra - DSS200


Metrology

Rudolph

AutoEL II

AutoEL III

AutoEL IV

Focus FE III

Focus FE IV

Focus FE VII


Therma-Wave

Opti-Probe 2600 2690

Opti-Probe 5240

Opti-Probe 3260 3290

Therma-Probe TP420

Therma-Probe TP500XP


CDE

CDE ResMap Model 168

CDE ResMap Model 178

CDE ResMap Model 273

CDE ResMap Model 463-FOUP and 463-OC

CDE ResMap Model 468


Why Refurbished?


Spare Parts

OnTrak Cleaner Key Spare Parts

Speedfam / IPEC Polisher Key Spare Parts

AutoEL & FE series Ellipsometer spare parts

Opti-Probe and Therma-Probe spare parts


Order Spare Parts/Place System Quote


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Lapping


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