Entrepix offers quality parts for a variety of legacy equipment within the CMP module. Entrepix supports platforms from Novellus (IPEC, SpeedFam), Lam Research (OnTrak), Rudolph Technologies and Applied Materials.


Entrepix provides the highest quality components selected or designed to meet OEM standards. Professional support and consulting are available through our inside sales group and product managers. Order accuracy is essential for our customers, therefore outgoing inspections are provided.


Entrepix has assigned product managers and engineering team to find engineering solutions to address obsolete parts or components.



For a quote:
E-Mail parts@entrepix.com or call +1 602 426-8677