Speedfam / IPEC Polisher Key Spare Parts

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E-Mail parts@entrepix.com or call +1 602 426-8677

IPEC 472 Platform

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Material #	Description
PU160035	Sensor fiber optics(load and unload)
PE010032	Shuttle force sensor
HP1000080	Pump Head
RK210020	Load cell 1000lbs arm
IT2031-N33	Regulator down force
HE640121	Valve Solenoid 3 way
372-72495-1	Upgraded Turn buckle, arm pivot
TR440015	Amplifier (APP-1000)
RK210009	Load Cell (APP-1000)
0100-102168	AMP MC-4 arm
RA010001	Fan Low voltage cabinet
QU140073	Motor Controller (Slurry)
TR030005	ISM Board
QT760505	Servo Amp APP1000 Horz.
QT760510	Servo Amp APP 1000 Vert.
RA030037	Fan High Voltage

IT2011-N22	Regulator back side air
HG960046	Vacuum Generator
SI-Tube-Final	Slurry tube final platen
SI-Tube-Primary	Slurry tube primary platen
372-15003-1	200MM lift plate

Material #	Description
372-68389-1	Bellow, Boot, Cascade Tub Rinse
0750-105092	Regulator, Electro-pneumatic
0750-105095	Regulator, Electro-pneumatic
HE430107	VALVE,2 WAY,N/C,02 SERV DIO.,12 IN
2200-101719	VALVE,3 WAY
ED190020	Rotary, Union, 5/8-18 Rotor
HE710000	Valve, 3 way
372-35144-1	Motor Controller Slurry Pumps
372M-35144-1	Motor Controller Carrier
372-36316-1	MC4 Motor Controller ARM
PU160047	Photoelectric AMP
QT460013	Amplifier
IT2031-N33	Regulator down force
372-72495-1	Upgraded Turn buckle, arm pivot
RA010001	Fan Low voltage cabinet
RA030037	Fan High Voltage
372M-29015-1	Slurry tube final platen
SI-Tube-Primary	Slurry tube primary platen
372-15003-1	200MM lift plate

Material #	Description
372-68389-1	Bellow, Boot, Cascade Tub Rinse
0750-105092	Regulator, Electro-pneumatic
0750-105095	Regulator, Electro-pneumatic
HE430107	VALVE,2 WAY,N/C,02 SERV DIO.,12 IN
2200-101719	VALVE,3 WAY
ED190020	Rotary, Union, 5/8-18 Rotor
HE710000	Valve, 3 way
372-35144-1	Motor Controller Slurry Pumps
372M-35144-1	Motor Controller Carrier
372-36316-1	MC4 Motor Controller ARM
PU160047	Photoelectric AMP
QT460013	Amplifier
IT2031-N33	Regulator down force
372-72495-1	Upgraded Turn buckle, arm pivot
RA010001	Fan Low voltage cabinet
RA030037	Fan High Voltage
372M-29015-1	Slurry tube final platen
SI-Tube-Primary	Slurry tube primary platen
372-15003-1	200MM lift plate