Equipment Services

Upgrades

• Consulting service to develop best solutions
• Implement options to meet customer requirements
• Realize custom tailored solutions by using Entrepix’ know-how and technical resources
• Extend life cycle to future technology nodes with optimized capabilities

Field Service

• Block Hours: guaranteed availability
• Preventative Maintenance: monthly, quarterly, yearly – ensure ISO certification
• Service Intervals: cover vacations, extended leave and turnover
• Service Contracts: customized to meet level reliability and uptime
• Software: verification and back-up
• Warranty Extension: available at various intervals

System Audit

• Comprehensive Hardware Check
• Wafer Handling Test
• Safety System Verification
• Recommendation for Improvements
• List of Recommended Spare Parts
• Full Report

Repair

• Fast equipment diagnostics
• Professional repair
• Replacement of defective parts or components

Training

• Accelerate the learning curve
• Limit extent of failures
• Increase tool lifetime
• Improve reliability (MTBF, availability, uptime)
• Several levels and customization available
• Components training available

Start-up

• Source inspection support
• Installation of equipment
• Relocation of equipment

Metrology Certification

• Thin Film Standards
• Recertification Services