CMP Equipment

Entrepix is a recognized leader in refurbished CMP and thin-film metrology equipment as well as the only OEM authorized refurbisher of Lam/Ontrak Post CMP Scrubbers. Entrepix also holds the exclusive license from Rudolph Technologies for the AutoEL series of ellipsometers.  Making the decision to purchase as-is, refurbished or new equipment is a question that can make or break your bottom line, and the right decision delivers superior performance and lower cost. Benefiting from the cost savings of previously owned semiconductor equipment is an attractive alternative to buying new; however, there are risks to purchasing used equipment on an "as is, where is" basis due to the unknown condition of used equipment. Purchasing fully refurbished equipment from Entrepix creates the best of both worlds, producing all the benefits and eliminating the risks.

Entrepix' extensive CMP and related metrology experience coupled with our CMP Foundry division provides a unique understanding of both the hardware and process issues our customers face. As an end user within our own CMP foundry division, we recognize the importance of having equipment that meets OEM specifications and is supported by a company you can rely on day in and day out. Entrepix guarantees this level of quality and after-sale support with every piece of equipment we sell.

Multiple OEMs, including Lam Research, Nova Instruments, Brooks Automation, and Nitto Denko have recognized the exceptional value of Entrepix' equipment services and contract or authorize Entrepix to provide such services on their behalf. In addition, we develop upgrades and retrofits to improve the performance of the equipment we sell to our customers.

Lapping Services

Entrepix offers lapping, film and carrier services for your CMP equipment needs. Our world class film lapping capabilities include, Tencor measurement capabilities, single-sided lappers, and laser cut films for reduced particle contamination.  We also offer pre-cut DF200 carrier films to Speedfam-IPEC standard or custom patterns.

Complete offering of carrier rebuild and refurbishment services for the SpeedFam-IPEC Auriga, CMPV, 372, and 472 series CMP tools. We can return your carriers back to OEM quality at a fraction of the cost of new. We offer pressure plate refurbishment: Resurfacing plate curvature to OEM specification or customer specifications, parallelism to OEM specification, cleaning, broken bolt removal, filmed and lapped to OEM specifications or custom customer specifications. We can refurbish and upgraded Gimbal bearings to a higher quality than OEM.

Entrepix lapping experience extends to polish platen lapping and refurbishment and non-CMP demands. Platen refurbishing includes: removal of scratches and damage, return curvature to OEM specifications, modify curvature to customer specifications.  Non-CMP capabilities include lapping a variety of materials, flat or curved specifications, no minimum quantities.

Lapping Services
Pressure Plate Lapping and Refurbishment

• Resurfacing plate curvature to OEM specification
• Parallelism to OEM specification
• Resurfacing plate curvature to customer specifications.
• Cleaning
• Broken bolt removal
• Filmed and lapped to OEM specifications
• Filmed and lapped to customer specifications

Films preparation

• Pre punch DF200 films
• Speedfam standard hole patterns
• IPEC standard hole patterns.
• Custom hole patterns and outer diameters.
• Films are punched using a CNC laser cutting system.
• No burrs
• No debris

Platen Lapping and Refurbishment

• Remove scratches and damage
• Return curvature to OEM specifications
• Modify curvature to customer specifications

Non CMP

• Lap a variety of materials
• Flat or curved specifications
• No minimum quantities