EPO Series: EPO-220, EPO-222, F-REX 200,
F-REX 300

Stand alone or integrated polish configurations

676 & 776

Orbital CMP platforms

472 & 372M

Rotational CMP platforms

DSS-200 Series 0, DSS-200 Series 1, DSS-200 Series 2

Post-CMP cleaner

DSS-200 Synergy

Post-CMP cleaner (HF compatible)

DSS-200 Integra

Auriga, Auriga-C & Auriga-EC

5-Head Stand alone or integrated CMP polisher

6DS-SP (nTegrity) & 6EG(nHance)

Rotational CMP platform

6EC (nSpire)

Rotational CMP platform

ResMap168/178/273/463

Automated four point probe for resistivity & metal thickness mapping

Dektak II, IIA

3 Series-3, 3ST, 3030

Surface profilometer & step height measurement

NovaScan 210/420/840/2040

Stand alone or integrated polish configurations

FE III, FE IV, FE VII, FE-IIID, FE-IVD, FE-VIID

Automated pattern rec, single wavelength ellipsometer up to 8"

AutoEl II, III, IV

Opti-Probe 2600/2600B/2600

DUV/2690/3290/3290UV

1000,2000,4000,5000,8000

New and refurbished robot

Nitto Denko

DR 8500 II, HR 8500 II

DR 3000 II, MA 3000 II

MSA 840

MA 1508N