Refurbished Equipment
Refurbished equipment offers you the best of both worlds; it costs significantly less than new equipment but comes with operational, performance and time line guarantees in addition to long-term support so your risk is eliminated.When Entrepix refurbishes a piece of equipment, we start by sourcing it from its original owner, then transport it to our facility. Once in-house we install and facilitize the tool and conduct a system baseline evaluation. We perform mechanical and electrical functionality testing and replace or repair any malfunctioning components. Next we reconfigure the tool to the new owner specs, perform a thorough cleaning and cleansing of all processing surfaces, align the appropriate tool components and test or upgrade software as required. Following calibration to traceable standards we do a final system evaluation and quality assurance (QA) check, followed by system wafer handling marathon testing. Once a system has passed our rigorous testing challenges it is prepped for shipping and sent to the new customer. We then install, qualify, and train onsite. Our refurbished systems come with a parts and labor warranty, and long-term applications support and parts and service contracts are also available.
Entrepix offers a full range of refurbished CMP and metrology equipment for sale. All refurbished equipment is guaranteed to meet OEM specifications and is backed by Entrepix' support.
Refurbished CMP Equipment
- Polishers - Stand alone or integrated
- Post-CMP cleaners
- Slurry and chemical delivery systems
Refurbished Metrology Equipment
- Film Thickness (dielectric and conductive)
- Profilometers
- Particle detection
- In-line dielectric metrology (Nova)
Please contact Bob Tucker directly at (602) 426-8675 or send us an E-mail at info@entrepix.com to discuss your equipment needs or to determine if a specific piece of equipment is available.