SpeedFam Auriga Refurbished CMP Equipment
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For SpeedFam refurbished equipment: For SpeedFam spare parts and upgrades: For SpeedFam equipment service / maintenance:  |
SpeedFam Auriga - CMP Wafer PolisherThe SpeedFam Auriga wafer polisher is a fully automated, precision tool for chemical mechanical planarization (CMP) polishing of semiconductor (and related industries) 150 mm and 200 mm wafers. The Auriga is a "dry-in" / "wet-out" process, known for the highest throughput of any CMP tool and is designed for low cost of ownership. Entrepix offers fully refurbished systems, spare parts, upgrades, and maintenance / service support on the Auriga Family of products. The wafer polisher utilizes CMP, removing virtually any semiconductor materials to polish the wafer and achieve flatness, uniformity, and planarization requirements on blanket or patterned device wafers. The polisher provides: fully automated precision polishing, process flexibility, and repeatable results. |
Preventative Maintenance ProgramOverview
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Upgrades and RefurbishmentOverview
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