Rudolph AutoEL IV

Rudolph AutoEL IV

For Rudolph refurbished equipment:
info@entrepix.com


For Rudolph spare parts and upgrades:
parts@entrepix.com


For Rudolph equipment service / maintenance:
service@entrepix.com

Or Call:
602-426-8677 (Sales)



Rudolph Ellipsometer AutoEL IV - Refurbished AutoEL Series

The AutoEL IV's design represents an understanding of the need for flexibility and precision in a film thickness tool: A three wavelength light source allows the versatility of choosing the wavelength best suited for the sample being measured, and helps to eliminate order ambiguities and other problems associated with measuring near full cycle thickness. The three wavelength system has a built-in "fail safe system" that automatically switches the optical system to the selected wavelength and makes the required changes to the data reduction software, providing ease of operation. A master/slave microprocessor with expanded data reduction software adds to the AutoEL lV's capability to measure a wide range of samples with great precision and accuracy.


Preventative Maintenance Program


Overview

  • Baseline evaluation to determine configuration and software revision
  • Remove and disassemble both the analyzer and polarizer gear boxes
  • Inspect and replace (as needed) all gears, shafts, bearing and optical components
  • Inspect main lamp socket or laser
  • Reinstall both gear boxes and perform full optics alignment (70 and 90 degrees)
  • Adjust lamp power supply for idle mode
  • Inspect and replace wavelength filters
  • Adjust photo multiplier tube for maximum output
  • Replace 40X lamp and modify circuit if required
  • Replace autocollimator lamp
  • Inspect and adjust 6-channel power supply
  • Adjust op amp section to factory recommended settings
  • Verify printer operation and repair as needed
  • System to system matching (if applicable)
  • Calibrate all wavelengths to a traceable standard