Speedfam / IPEC Polisher Key Spare Parts
For a quote: parts@entrepix.com
Aaron Contreras: (602) 426-0720
| IPEC 472 Platform | |
| PU160035 | Sensor fiber optics(load and unload) |
| PE010032 | Shuttle force sensor |
| HP1000080 | Pump Head |
| RK210020 | Load cell 1000lbs arm |
| IT2031-N33 | Regulator down force |
| HE640121 | Valve Solenoid 3 way |
| 372-72495-1 | Upgraded Turn buckle, arm pivot |
| TR440015 | Amplifier (APP-1000) |
| RK210009 | Load Cell (APP-1000) |
| 0100-102168 | AMP MC-4 arm |
| RA010001 | Fan Low voltage cabinet |
| QU140073 | Motor Controller (Slurry) |
| TR030005 | ISM Board |
| QT760505 | Servo Amp APP1000 Horz. |
| QT760510 | Servo Amp APP 1000 Vert. |
| RA030037 | Fan High Voltage |
| IT2011-N22 | Regulator back side air |
| HG960046 | Vacuum Generator |
| SI-Tube-Final | Slurry tube final platen |
| SI-Tube-Primary | Slurry tube primary platen |
| 372-15003-1 | 200MM lift plate |
| IPEC 372 Platform | |
| 372-68389-1 | Bellow, Boot, Cascade Tub Rinse |
| 0750-105092 | Regulator, Electro-pneumatic |
| 0750-105095 | Regulator, Electro-pneumatic |
| HE430107 | VALVE,2 WAY,N/C,02 SERV DIO.,12 IN |
| 2200-101719 | VALVE,3 WAY |
| ED190020 | Rotary, Union, 5/8-18 Rotor |
| HE710000 | Valve, 3 way |
| 372-35144-1 | Motor Controller Slurry Pumps |
| 372M-35144-1 | Motor Controller Carrier |
| 372-36316-1 | MC4 Motor Controller ARM |
| PU160047 | Photoelectric AMP |
| QT460013 | Amplifier |
| IT2031-N33 | Regulator down force |
| 372-72495-1 | Upgraded Turn buckle, arm pivot |
| RA010001 | Fan Low voltage cabinet |
| RA030037 | Fan High Voltage |
| 372M-29015-1 | Slurry tube final platen |
| SI-Tube-Primary | Slurry tube primary platen |
| 372-15003-1 | 200MM lift plate |
| Speedfam Auriga Platform | |
| 961242 | Ceramic Endeffector |
| 964895 | Robot vacuum switch |
| 969429 | Waferloss sensor upgraded |
| 966423 | Robot Dry valve |
| 966422 | Robot wet valve |
| 951695 | Vacuum valve MHTA arm |
| 931414-1 | Blow off/ backfill valve MHTA arm |
| 951844 | power supply I/O rack |
| 950179 | Pad Conditione gimble bearing |
| BE-100011AF | Valve, Norgren Rep, Carrier |
| BE-100002AF | Valve, Norgren Rep, Cups |
| 966652 | Flipper box wafer present sensor |
| 966651 | Flipperbox open sensor |
| 960537 | Bam |
| 950607 | Amp |
| AC2202A1 | TRANSDUCER, 0-60 PSI |
| AC2425A1 | TRANSDUCER, 0-30PSI |
| AC3648 | Cylinder, Air Lift Cups |
| 953191 | Rotary union |
| AC3014A1 | Sensor, Prox, Cups Down |
| 977921 | Robot |