Strasbaugh Refurbished CMP Equipment
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For Strasbaugh refurbished CMP equipment: For Strasbaugh CMP spare parts: For Strasbaugh service or maintenance: ![]() |
Strasbaugh 6EG nHance - CMP Wafer PolisherThe Strasbaugh 6-EG model is an economical tool for chemical mechanical planarization (CMP) research, failure analysis and low volume production. Its semi-automatic operations are programmable through a color touch screen graphical user interface (GUI) for repeatable and accurate process control. The 6-EG uses the same process control methods, wafer carrier, load station and pad conditioner as the fully automatic 6DS-SP CMP system. The 6-EG is an affordable 300 mm solution. |
Preventative Maintenance ProgramOverview
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