Strasbaugh Refurbished CMP Equipment

For Strasbaugh refurbished CMP equipment:
info@entrepix.com

For Strasbaugh CMP spare parts:
parts@entrepix.com

For Strasbaugh service or maintenance:
service@entrepix.com

Or Call:
602-426-8677

Strasbaugh 6EG nHance - CMP Wafer Polisher

The Strasbaugh 6-EG model is an economical tool for chemical mechanical planarization (CMP) research, failure analysis and low volume production. Its semi-automatic operations are programmable through a color touch screen graphical user interface (GUI) for repeatable and accurate process control.

The 6-EG uses the same process control methods, wafer carrier, load station and pad conditioner as the fully automatic 6DS-SP CMP system. The 6-EG is an affordable 300 mm solution.

Preventative Maintenance Program

Overview

• General Clean and Inspections
• Clean and Lubricate All Rails and Drives
• Baseline Equipment
• Load Calibrations
• Platen Run Out
• Arm Sweep Calibrations
• Carrier Run Out
• Down Force Calibration
• Back Pressure Calibrations
• Pad Conditioner Operations Check
• Unload Calibrations
• Tool-Specific Issues Addressed