Refurbished Ontrak DSS200 Series 2

Lam OnTrak DSS200 Series 2

For OnTrak refurbished CMP equipment:
info@entrepix.com


For OnTrak CMP spare parts:
parts@entrepix.com


For OnTrak equipment service or maintenance:
service@entrepix.com

Or Call:
602-426-8677 (Sales)

Used Lam OnTrak DSS200 Series 2 - OnTrak Double Sided Scrubber

Entrepix is an industry-leading supplier of used OnTrak DSS200 tools, including OEM-Authorized refurbished Series 2 OnTrak double sided scrubber platforms. The system is composed of multiple components which operate together to achieve processing requirements for semiconductor wafer cleaning. The major system components include:

  • Wet input station for automated wafer loading into the cleaner.
  • Brush station #1 is the first brush station where the wafers enter the processing cycle. The first scrub process is performed on PVA brushes using DI water and dilute cleaning chemistries.
  • Brush station #2 is a second scrub process that uses PVA brushes using DI water and dilute cleaning chemistries.
  • The spin station is the third processing station: wafers receive a final rinse, followed by a spin dry in the SRD while a heat lamp assists in the completion of the drying process. This station may also include an optional Megasonic cleaning station and/ or dilute chemical dispense prior to final rinse.
  • Wafers are transported out of the spin station using an unload handler/ mechanical arm which transfers the clean wafers to the output station.
  • The output station contains a wafer indexer that receives the wafers from the handler and loads the clean dry wafers into a cassette for transfer to the next processing step.

Options:

  • Wafer sizes: Configurable for 100 mm, 125 mm, 150 mm and 200 mm
  • Remote Electrical Enclosure
  • Megasonic Cleaning Unit
  • Edge Cleaning in both brush boxes
  • Chemical distribution (interchangeable for 2% NH4OH, through the brush, 2% NH4OH drip (standard configurations), and NH4OH through-the brush)
  • Through-the-back (TTB) Facilities Hookup
  • Through-the-floor (TTF) Facilities Hook up
  • Through-the-Front Wafer Load Input Station

Preventative Maintenance Program


Overview

  • General Clean and Inspections
  • Verify Facilities, Tool Matching
  • Replace Brushes and Edge Rollers
  • Calibrate Brush Parallelism
  • Calibrate Wafer Handling - Smooth Wafer Flow
  • Install PM Kit
    • Complete OEM-Specific Kit
    • Customer-Customized Kit
    • Entrepix Recommended Kit
  • Tool-Specific Issues Addressed

Upgrades and Refurbishment


Overview

  • Idle Flow Retrofit, DI Conservation
  • Hastelloy Spin Carriage
  • Flat Panel Touch Screen
  • Flow Monitoring
  • OPTO Interrupt Sensor Upgrade
  • Fiber Amplifier Upgrade