Entrepix Receives Multiple Orders for New DSS-200 Synergy Cleaning Systems
Orders from customers in Europe and U.S. underscore continued strong demand for 200mm equipment that integrates new control and compliance capabilities
Phoenix - July 9, 2018 - Entrepix Inc., a leading provider of wafer cleaning and chemical mechanical planarization (CMP) equipment and process services, today announced it has received orders from customers in the U.S. and Europe for its new, improved Entrepix DSS-200 Synergy Double-Sided Cleaners. The systems are equipped with a range of upgrades that allow users to meet their ongoing processing requirements for 200mm wafers-a need that industry experts agree won't abate anytime soon, with 200mm fabs expected to remain viable for at least the next 10-12 years. One system has already shipped, and the second will ship in Q3.
"Having the capacity to build new, improved systems to support many of our existing customers is paramount, as equipment configurable for 200mm and smaller wafers remains in short supply on the secondary market," said Jim Mello, VP, Sales and Customer Support for Entrepix. "Clearly, demand remains strong for the Synergy platform and its sister models, the Series II CE and Integra. Many standalone 200mm polishers are still in operation, and each requires a standalone cleaner to support it. By making improvements to an established, reliable platform, we are demonstrating our commitment to continue supporting this equipment and market well into the future."
The updated Entrepix DSS-200 Synergy platform features a new controls-system upgrade for the Windows® 7 and Windows® 10 operating systems. Another new capability is compatibility with the High-speed SECS Message Service (HSMS) protocol, which improves traceability of a wafer through the system while providing substantially more process details.
The Synergy platform also incorporates a UL 508-certified control box and is compliant with FM4910, the fire-retardant property standard for materials used in cleanrooms. Other features of the new tool include:
- Solid-state hard drive
- Ethernet access
- System event logging by wafer, lot, user and submodule; available on-screen or through host automation
- Multilevel security access settings by individual user
- Highly improved interrupt and module-based wafer recovery
- Preprogrammed maintenance calendar alerts
- Automated real-time monitoring of specific wafer, brush, motor and chemical flow parameters
About Entrepix Inc.
Entrepix Inc. serves the semiconductor and related industries as a leading provider of chemical mechanical polishing (CMP) technology and services to IDMs, OEMs, MEMS, nanotechnology and CMP consumables suppliers. The company renews technology for existing and emerging CMP users by refurbishing semiconductor equipment or adapting the equipment for use in novel applications, such as airbag sensors and acoustic filters. As a technology renewal partner, Entrepix enables long-term, reliable, predictable and cost-effective performance of CMP and cleaning equipment. Headquartered in Phoenix, Entrepix operates a 38,000 square foot facility housing its CMP foundry and equipment remanufacturing facilities. http://www.entrepix.com/.
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