NexGen MG Series Single-Wafer Wet Etch Platform

Entrepix provides North America sales and service for NexGen’s MG Series platforms

For NexGen single-wafer wet etch equipment: 
info@entrepix.com

For NexGen spare parts: parts@entrepix.com

For NexGen MG Series equipment service or maintenance: 
service@entrepix.com

Or Call:
+1 602 426-0544 (Sales)

NexGen MG Series Single-Wafer Wet Etch Platform

The NexGen MG Series is a proven single-wafer wet etch platform offering customized solutions to address a wide range of customer etch requirements. The company’s patented wet etch technology enables a variety of process applications and technologies, including ultra-thin wafer processing, wafer thickness and TTV control, and the ability to dispense up to four chemistries on a single platform.

NexGen MG Series delivers best-in-class processes and cost-of-ownership performance, with excellent RAM data. Starting with an economic base tool model, the modular platform has a variety of optional add-on modules and technologies available to meet your manufacturing requirements.

The NexGen MG Series comprises:

• MG2x series: 100 to 200mm processing
• MG3x series: 100 to 300mm processing
• Up to 4 different chemistry applications
• Integrated multicomponent chemistry mix system

The platform achieves best-in-class process performance for:

• Point-of-use process control
• Wafer and layer thickness control
• Ultra-thin wafer processing
• Concentration control and monitoring

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