Custom Equipment, Tailored To Your Needs

From applications requiring niche customizations to our equipment offerings and developing a pre-engineered CMP or cleaning module for your system, Entrepix is here to help.

Customized OnTrak DSS-200 Tools

Entrepix designed a customized DSS-200 OnTrak with blacked out brush box lid, spin, and output covers to prevent damage to photosensitive wafers, HEPA fan filters, and more.

We designed this customized DSS-200 OnTrak to accommodate one customer’s unique situation. The tailor-made features included:

  • Blacked out brush box lid as well as spin and output covers to prevent damage to photosensitive wafers

  • Specialized brush lid design to allow it to double as a cassette queueing station

  • HEPA fan filter units to create laminar airflow in post-clean stations

  • Custom configured fluid inputs and drains running through the left end of the tool to accommodate a unique cleanroom layout

 Adapting 200mm Cleaning Tech for 300mm

Entrepix has adapted 200mm and below cleaning technology to work in 300mm modular formats.
Entrepix has adapted 200mm and below cleaning technology to work in 300mm modular formats.

We’ve adapted our 200mm and below cleaning technology to work for 300mm in a modular format, bringing our leading technology to a broader market. Our technology is available for integration into your equipment, today.

 Modular Cleaning To Fit Your Needs

Cleaning technologies from our tried-and-true OnTrak DSS-200 are now available for integration into your wafer processing system! With over a billion wafers cycled through OnTrak tools, we offer reliable, turn-key cleaning module solutions that exactly fit your needs.

Get a Custom Engineered Product

Want options unique to your application? Need something that doesn’t exist yet? We’ll make it for you. Tell us about what you need and we’ll reply shortly.