Entrepix Entegrity Polish Head Tester
The Smarter Way to CMP
Entrepix’ next-generation head tester puts the data in your hands to achieve less downtime and significant cost savings.
Entrepix designed this innovative, customer-favorite head tester through years of testing and troubleshooting. Now the head testing step transforms from a simple verification tool in the legacy version into a powerful troubleshooting platform. The new Entrepix head tester provides powerful troubleshooting capability that helps users dial in sensitive CMP processes while tracking each head via serial number. Our tester simulates wafer de-chuck and automatically checks the wafer present/absent sensor function, all while tracking test data for statistical process control.
Available in 6 zone for Titan I, Titan II (Profiler), and Contour polish heads
Available in 8 zone for Titan I, Titan II (Profiler), Contour and EVO polish heads.
Entrepix’ head tester allows real-time monitoring of “cross-talk” between head chambers and allows users to interrupt testing for faster chamber troubleshooting.
User friendly, easy operation
Operation is as simple as loading a polishing head and starting a test recipe. The new Entrepix head tester also features:
User-friendly touchscreen interface
Head type selection
Wafer absent/wafer present sensor selection for de-chuck sequence
Head serialization for data tracking
Data logging and graph interface
Network compatible or user level dependent USB interface for data downloads
Customizable settings and recipe saving for unique head configurations
Consistent results, increased uptime
Interested in what the Entegrity polish head tester by Entrepix can do for you? Tell us about your needs and we’ll get back to you shortly.
