CMP Head Rebuild Services
Head360™ Program
CMP Head Rebuild Services
Reduce CMP Head Rebuild Costs. Reduce Downtime. Improve Yield.
The Entrepix Head360™ Program is a comprehensive CMP head rebuild and lifecycle management solution for Applied Materials Mirra® and Reflexion® polishing systems. Unlike conventional rebuild programs, every rebuilt head undergoes 100% functional testing on the Entegrity™ Head Tester, providing documented performance verification before the head returns to production.
Whether you need Titan, Profiler, Contour, EVO, or Horizon head rebuilds, or other CMP head services, Head360 delivers lower cost of ownership, reduced qualification risk, and improved long-term reliability.
Why Head360?
Most rebuild providers focus on returning a head to service. Head360 focuses on reducing your total cost of quality.
Poorly rebuilt heads can create hidden costs including:
Qualification failures
Unexpected downtime
Process instability
Wafer defects and scratches
Yield loss
Additional engineering time
Expedited shipments
Premature head replacement
The true cost of a CMP head rebuild is not the rebuild invoice. It is the cost of a rebuild that doesn't perform correctly when installed on the tool.
What Makes Head360 Different?
100% Entegrity™-Tested Rebuilds
Every rebuilt head is tested on the industry-standard Entegrity Head Tester before shipment.
The Entegrity platform verifies:
Zone pressure response
Pressure and vacuum integrity
Zone-to-zone leakage
Wafer detect functionality
Chamber performance
Head-specific operating parameters
Complete test reports accompany every rebuild, providing objective performance documentation and historical data for process engineers and maintenance teams.
Experienced CMP Specialists
Our team includes engineers and technicians with decades of experience servicing Applied Materials Mirra and Reflexion polishing platforms, providing support across multiple generations of CMP head technologies
Data-Driven Quality Control
Most head rebuild providers inspect and rebuild. Head360 rebuilds, tests, measures, documents, and verifies.
The Entegrity-generated performance data allows Entrepix to identify issues before a head returns to production. Internal Head360 program data and sales materials indicate that this testing-based methodology delivers up to 4X lower defect and qualification-related failures compared with rebuild programs that do not perform equivalent functional testing and reporting.
The Head2Head™ Benchmarking Process
See the Difference Before You Commit
The easiest way to begin with Head360 is through our Head2Head comparative benchmarking program.
The Head2Head process allows customers to evaluate Head360 performance using real production conditions before transitioning to a broader rebuild program.
Cost of Quality Comparison
Rebuild Price Is Only Part of the Story
| Cost Factor | Typical Rebuild Program | Head360™ Program |
|---|---|---|
| Rebuild Cost | ⚠Lower focus | ✔Competitive |
| Qualification Failures | ✖Higher risk | ✔Reduced through 100% testing |
| Tool Downtime | ✖Higher | ✔Lower |
| Engineering Investigation | ⚠Frequent | ✔Reduced |
| Yield Impact | ⚠Variable | ✔Reduced |
| Test Documentation | ⚠Limited | ✔Comprehensive |
| Failure Analysis Data | ⚠Limited | ✔Included |
| Process Visibility | ⚠Limited | ✔High |
Example Annual Impact
For a fab operating multiple CMP tools, even a small reduction in qualification failures can create significant savings through:
Increased tool utilization
Reduced engineering labor
Reduced wafer scrap
Improved equipment availability
Better process control
Fewer emergency rebuild events
Because every rebuilt head is tested and documented before shipment, Head360 is designed to address the largest hidden cost in CMP maintenance: rebuild-related process excursions
Supported CMP Head Platforms
Applied Materials Mirra® Head Rebuilds
Titan Head Rebuilds
Titan II Head Rebuilds
Profiler Head Rebuilds
Contour Head Rebuilds
Custom rebuild configurations
Applied Materials Reflexion® Head Rebuilds
Titan Head Rebuilds
Profiler Head Rebuilds
Contour Head Rebuilds
EVO Head Rebuilds
Horizon Head Rebuilds
Custom rebuild configurations
All rebuilds include complete disassembly, inspection, replacement of wear components, reassembly, calibration, Entegrity testing, and formal test documentation.
Ready to Reduce CMP Head Cost of Quality?
Compare your current rebuild program against Head360 using our Head2Head benchmarking process.